Detail publikace

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

PREZIOSO, S., LUCIANI, D., TUCCERI, P., deMARCO, P., GAUDIERI, A., KAISER, J., SANTUCCI, S., OTTAVIANO, L., ZUPPELLA, P.,

Originální název

Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported. The laser was developed in a frame of international cooperation at the University of LAquila, Italy. Interference Nano-Litography is one of the svereal applications this laser is used for.

Klíčová slova

nano-litography, soft X-ray laser, Ar+8, 46.9 nm

Autoři

PREZIOSO, S., LUCIANI, D., TUCCERI, P., deMARCO, P., GAUDIERI, A., KAISER, J., SANTUCCI, S., OTTAVIANO, L., ZUPPELLA, P.,

Rok RIV

2009

Vydáno

1. 9. 2009

Nakladatel

Task Publishing

Místo

Gdansk, Poland

ISBN

978-83-908112-7-7

Kniha

Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter

Číslo edice

1

Strany od

249

Strany do

249

Strany počet

1

BibTex

@inproceedings{BUT32646,
  author="Jozef {Kaiser}",
  title="Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography",
  booktitle="Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter",
  year="2009",
  number="1",
  pages="249--249",
  publisher="Task Publishing",
  address="Gdansk, Poland",
  isbn="978-83-908112-7-7"
}