Detail publikace

Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition

PEKÁREK, J. VRBA, R. MAGÁT, M. JAŠEK, O.

Originální název

Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Carbon nanotubes (CNTs) are molecular-scale tubes of graphitic carbon with outstanding properties. They are among the stiffest and strongest fibers known, and have remarkable electronic properties and many other unique characteristics. In our experiment, CNTs were synthesized using plasma enhanced chemical vapor deposition on the silicon wafer with patterned iron catalytic layer. If the catalyst is uniformly distributed, nanotubes grow everywhere on the substrate. If the catalyst is only located in certain areas (patterned), then nanotubes grow only in those areas. Iron catalytic layers with defined shapes and dimensions were prepared for carbon nanotubes growth. Various dimensions of these shapes were fabricated to monitor influence of catalytic layers. There were produced shapes from 100 nm to 10 um dimensions. Freestanding carbon nanotubes were prepared in our experiment.

Klíčová slova

Carbon nanotubes, Plasma enhanced chemical vapor deposition, Catalyst

Autoři

PEKÁREK, J.; VRBA, R.; MAGÁT, M.; JAŠEK, O.

Rok RIV

2011

Vydáno

11. 5. 2011

Nakladatel

Technical University of Košice

Místo

Košice

ISBN

978-1-4577-2112-0

Kniha

ISSE 2011, 34th International Spring Seminar on Electronics Technology, Conference Proceedings

Edice

1

Číslo edice

1

Strany od

515

Strany do

518

Strany počet

4

URL

http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6053940

BibTex

@inproceedings{BUT36226,
  author="Jan {Pekárek} and Radimír {Vrba} and Martin {Magát} and Ondřej {Jašek}",
  title="Preparation of freestanding carbon nanotubes using plasma enhanced chemical vapor deposition",
  booktitle="ISSE 2011, 34th International Spring Seminar on Electronics Technology, Conference Proceedings",
  year="2011",
  series="1",
  number="1",
  pages="515--518",
  publisher="Technical University of Košice",
  address="Košice",
  isbn="978-1-4577-2112-0",
  url="http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6053940"
}