Detail publikace

Scintillation secondary electron detector for VP-SEM

ČUDEK, P.

Originální název

Scintillation secondary electron detector for VP-SEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The article deals with the scintillation secondary electron detector for a variable pressure scanning electron microscope, its electrode system optimization and measurement of the pressure in the detector for different types of pressure limiting apertures.

Klíčová slova

Scintillation SE detector, secondary electrons (SE), variable pressure scanning electron microscope (VP-SEM), voltage contrast.

Autoři

ČUDEK, P.

Rok RIV

2011

Vydáno

28. 4. 2011

ISBN

978-80-214-4273-3

Kniha

Student EEICT proceedings of the 17th conference volume 3

Číslo edice

1

Strany od

402

Strany do

406

Strany počet

5

BibTex

@inproceedings{BUT36880,
  author="Pavel {Čudek}",
  title="Scintillation secondary electron detector for VP-SEM",
  booktitle="Student EEICT proceedings of the 17th conference volume 3",
  year="2011",
  number="1",
  pages="402--406",
  isbn="978-80-214-4273-3"
}