Detail publikace

Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances

OHLÍDAL, I., FRANTA, D., OHLÍDAL, M., NAVRÁTIL, K.

Originální název

Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

In this contribution a new efficient modification of a method that enables us to perform the optical characterization of nonabsorbing and weakly absorbing thin films without using the absolute values of the reflectances measured is presented. Namely, this modification is based on determining the values of the wavelengths corresponding to touching the spectral dependences of the reflectances of the studied films measured for several angles of incidence with the envelopes of maxima and minima of these spectral dependences. By means of combining the explicit formulas containing the wavelengths mentioned and the suitable iteration procedure one can evaluate the values of the thicknesses and spectral dependences of the refractive indices of the films analyzed in reliable and precise ways. (C) 2001 Optical Society of America.

Klíčová slova

REFLECTION, CONSTANTS, THICKNESS, SILICON, SYSTEM

Autoři

OHLÍDAL, I., FRANTA, D., OHLÍDAL, M., NAVRÁTIL, K.

Rok RIV

2001

Vydáno

1. 11. 2001

ISSN

0003-6935

Periodikum

Applied Optics

Ročník

2001 (40

Číslo

31

Stát

Spojené státy americké

Strany od

5711

Strany do

5717

Strany počet

7

BibTex

@article{BUT39790,
  author="Ivan {Ohlídal} and Daniel {Franta} and Miloslav {Ohlídal} and Karel {Navrátil}",
  title="Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances",
  journal="Applied Optics",
  year="2001",
  volume="2001 (40",
  number="31",
  pages="7",
  issn="0003-6935"
}