Detail publikace

Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method

OHLÍDAL, M., OHLÍDAL, I., FRANTA, D., KRÁLÍK, T., JÁKL, M., ELIÁŠ, M.

Originální název

Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

An original method enabling us to characterize the non-uniformity of thin-film thickness is decribed. This method employs the interpretation of data obtained by multiple-wavelength reflectometry. The values of the reflectance are measured for several wavelengths in many points lying along the area of the film. The spectral dependence of the refractive index of the material forming the film is determined using variable-angle spectroscopic ellipsometry.

Klíčová slova v angličtině

non-uniform thin films, optical characterization

Autoři

OHLÍDAL, M., OHLÍDAL, I., FRANTA, D., KRÁLÍK, T., JÁKL, M., ELIÁŠ, M.

Rok RIV

2002

Vydáno

1. 8. 2002

ISSN

0142-2421

Periodikum

Surface and Interface Analysis

Ročník

34

Číslo

1

Stát

Spojené království Velké Británie a Severního Irska

Strany od

660

Strany do

663

Strany počet

4

BibTex

@article{BUT40936,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Daniel {Franta} and Tomáš {Králík} and Miloš {Jákl} and Marek {Eliáš}",
  title="Optical characterization of thin films non-uniform in thickness by a multiple-wavelength reflectance method",
  journal="Surface and Interface Analysis",
  year="2002",
  volume="34",
  number="1",
  pages="4",
  issn="0142-2421"
}