Detail publikace

Usage of Segmental Ionization Detector at Environmental Conditions

AUTRATA, R., JIRÁK, J., SCHNEIDER, L.

Originální název

Usage of Segmental Ionization Detector at Environmental Conditions

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Environmental scanning electron microscope operates with the gaseous environment in the specimen chamber. This environment causes specific conditions for the detection of signal electrons. Classical Everhart-Thornley detector cannot be exploited for the detection of secondary electrons because of the impossibility to use high enough electric field in a gaseous environment to add sufficient energy to secondary electrons for efficient scintillation. Ionization detector is therefore used for the detection of signal electrons in environmental SEM most frequently.

Klíčová slova

ESEM, Ionization detector

Autoři

AUTRATA, R., JIRÁK, J., SCHNEIDER, L.

Vydáno

1. 1. 2003

Strany od

142

Strany do

143

Strany počet

2

BibTex

@article{BUT41443,
  author="Rudolf {Autrata} and Josef {Jirák} and Luděk {Schneider}",
  title="Usage of Segmental Ionization Detector at Environmental Conditions",
  year="2003",
  volume="9",
  number="3",
  pages="2"
}