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FRANTA, D. NEČAS, D. OHLÍDAL, I. HRDLIČKA, M. PAVLIŠTA, M. FRUMAR, M. OHLÍDAL, M.
Originální název
Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films
Typ
článek v časopise ve Web of Science, Jimp
Jazyk
angličtina
Originální abstrakt
The optical characterisation of the As33Se67 and Ge2Sb2Te5 chalcogenide thin films is carried out using the combined method of VASE and SR. This method permits to determine both structural and dispersion parameters describing the thin films exhibiting various defects. The structural model is based on including roughness, overlayers and thickness non-uniformity. The dispersion models are based on parametrisation of the joint density of states. These models, unlike the classical models derived from the Lorentz oscillator model, can describe finite bands which allows to introduce a parameter proportional to the density of electrons. It is shown that this method enables to investigate quantitatively changes in the electronic structure of the materials caused by phase transitions which is demonstrated on the Ge2Sb2Te5. It is shown that the combined method with including true structural and dispersion models is a powerful tool for the optical characterisation of thin films exhibiting disordered structure.
Klíčová slova
Ellipsometry; Photometry; Chalcogenige; Thin film
Autoři
FRANTA, D.; NEČAS, D.; OHLÍDAL, I.; HRDLIČKA, M.; PAVLIŠTA, M.; FRUMAR, M.; OHLÍDAL, M.
Rok RIV
2009
Vydáno
25. 12. 2009
Nakladatel
NATL INST OPTOELECTRONICS
Místo
BUCHAREST-MAGURELE 76900, ROMANIA
ISSN
1454-4164
Periodikum
Journal of Optoelectronics and Advanced Materials
Ročník
11
Číslo
12
Stát
Rumunsko
Strany od
1891
Strany do
1898
Strany počet
8
BibTex
@article{BUT49384, author="Daniel {Franta} and David {Nečas} and Ivan {Ohlídal} and Martin {Hrdlička} and Martin {Pavlišta} and Miloslav {Frumar} and Miloslav {Ohlídal}", title="Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films", journal="Journal of Optoelectronics and Advanced Materials", year="2009", volume="11", number="12", pages="1891--1898", issn="1454-4164" }