Detail publikace

Optical characterization of absorbing thin films non-uniform in thickness using imaging spectroscopic reflectometry

OHLÍDAL, M. OHLÍDAL, I. KLAPETEK, P.

Originální název

Optical characterization of absorbing thin films non-uniform in thickness using imaging spectroscopic reflectometry

Typ

abstrakt

Jazyk

angličtina

Originální abstrakt

Application of the imaging spectroscopic reflectometry to the optical characterization of non-uniform absorbing carbon-nitride thin films is presented. It is possible to determine the area distribution of the optical constants of the non-uniform films together with their thickness distribution using this technique.

Klíčová slova

Absorbing thin films, optical parameters

Autoři

OHLÍDAL, M.; OHLÍDAL, I.; KLAPETEK, P.

Vydáno

7. 7. 2008

Nakladatel

International Commission for Optics

Místo

Sydney

Strany od

50

Strany do

50

Strany počet

1

BibTex

@misc{BUT60549,
  author="Miloslav {Ohlídal} and Ivan {Ohlídal} and Petr {Klapetek}",
  title="Optical characterization of absorbing thin films non-uniform in thickness using imaging spectroscopic reflectometry",
  year="2008",
  pages="50--50",
  publisher="International Commission for Optics",
  address="Sydney",
  note="abstract"
}