Detail publikace

Fabrication of nanostructures by AFM local Oxidation

LOPOUR, F., ŠIKOLA, T., ŠKODA, D.

Originální název

Fabrication of nanostructures by AFM local Oxidation

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

In the paper AFM studies of microstructures etched by ion beams into Si and Au surfaces, and AFM local anodic oxidation of Ti thin films is presented. Using the AFM technique the etching limits of inert atoms in production of silicon and silver grids were found. It was proved that the height of Ti oxide lines fabricated by AFM increases linearly with the voltage between a tip and a sample. On the other hand, the half-width of the lines did not depend linearly on this voltage. The results are useful for studies of quantum effects in nanostructures and experiments in fabrication of nanoelectronic devices (e.g. SET).

Klíčová slova v angličtině

AFM fabrication, local anodic oxidation, oxide nanostructures

Autoři

LOPOUR, F., ŠIKOLA, T., ŠKODA, D.

Rok RIV

2002

Vydáno

15. 11. 2001

Nakladatel

FEI VUT v Brně

Místo

Brno

ISBN

80-214-1992-X

Kniha

Sborník příspěvků konference Nové trendy ve fyzice

Strany od

394

Strany do

399

Strany počet

6

BibTex

@{BUT69641
}