Detail publikace

Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes

HÁZE, J. PEKÁREK, J. MAGÁT, M. PAVLÍK, M. VRBA, R.

Originální název

Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

The paper deals with novel Micro-Electro-Mechanical System (MEMS) structure. The structure was designed to be utilized as capacitance pressure sensor. The most applicable topology of the MEMS structure was selected by means of electrostatic model analysis made by MatLAB software. There were proposed five structures and the best solution was selected as the chessboard structure, since it provides the suitable capacity for the sensor measurement range. The overall capacity and also sensitivity of the MEMS sensor was increased by means of carbon nanotubes (CNTs). Therefore the pressure measurement range increased as well. The comparison between conventional capacitance sensor structures and the presented proposal shown, that the improvement depends on the area and number of the growing fields. However this improvement is from tens to hundereds of percents. The article depicts the design process including simulations and analysis of the chosen structure too.

Klíčová slova

MEMS, capacitive sensor, carbon nanotubes

Autoři

HÁZE, J.; PEKÁREK, J.; MAGÁT, M.; PAVLÍK, M.; VRBA, R.

Rok RIV

2011

Vydáno

12. 9. 2011

Místo

Brighton

ISBN

978-0-9568086-0-8

Kniha

Proceedings of 18th European microelectronics packaging conference EMPC 2011

Strany od

79

Strany do

83

Strany počet

5

BibTex

@inproceedings{BUT73295,
  author="Jiří {Háze} and Jan {Pekárek} and Martin {Magát} and Michal {Pavlík} and Radimír {Vrba}",
  title="Design, modeling and fabrication of novel MEMS structure utilizing carbon nanotubes",
  booktitle="Proceedings of 18th European microelectronics packaging conference EMPC 2011",
  year="2011",
  pages="79--83",
  address="Brighton",
  isbn="978-0-9568086-0-8"
}