Detail publikace

Obtaining of nanocrystalline aluminum nitride layers on sapphire

SAFARALIEV, G. BILALOV, B. KARDASHOVA, G. SOBOLA, D. GITIKCHIEV, M.

Originální název

Obtaining of nanocrystalline aluminum nitride layers on sapphire

Anglický název

Získání vrstev nanokrystalického AlN na safíru

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

ruština

Originální abstrakt

This study describes the possibility of AlN nanocrystalline layers formation on the sapphire. Mean hardness of Vickers is defined for AlN in the 20-1400 oC temperature range. It was equal 18 GPa.

Anglický abstrakt

This study describes the possibility of AlN nanocrystalline layers formation on the sapphire. Mean hardness of Vickers is defined for AlN in the 20-1400 oC temperature range. It was equal 18 GPa.

Klíčová slova

mean hardness, pressure, nitridization, sputtering

Klíčová slova v angličtině

mean hardness, pressure, nitridization, sputtering

Autoři

SAFARALIEV, G.; BILALOV, B.; KARDASHOVA, G.; SOBOLA, D.; GITIKCHIEV, M.

Vydáno

26. 5. 2009

Nakladatel

SPb. Izdatelstvo Polytech. univer.

Místo

St.-Petersburg

Strany od

237

Strany do

239

Strany počet

3

BibTex

@inproceedings{BUT76501,
  author="Gadjimet {Safaraliev} and Bilal {Bilalov} and Gulnara {Kardashova} and Dinara {Sobola} and Magomed {Gitikchiev}",
  title="Obtaining of nanocrystalline aluminum nitride layers on sapphire",
  booktitle="9-th International conference {"}Films and coatings -2009{"}",
  year="2009",
  number="009",
  pages="237--239",
  publisher="SPb. Izdatelstvo Polytech. univer.",
  address="St.-Petersburg"
}