Detail publikace

Peculiarities of the obtaining process of silicon carbide and aluminum nitride

BILALOV, B. KARDASHOVA, G. ABDURAZAKOV, A. SOBOLA, D. ARKHIPOV, A.

Originální název

Peculiarities of the obtaining process of silicon carbide and aluminum nitride

Anglický název

Zvláštnosti procesu tvorby SiC a AlN

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

ruština

Originální abstrakt

Obtaining of solid solutions of SiC-AlN system with predictable composition and with expected physical-chemical properties is only possible on the basis of whole and detail investigation of interaction character between components of solid solution and by study of connection between composition and properties. The objects of this study are samples of thin films of aluminum nitride and its solid solutions formatted on silicon carbide substrates by sublimation of source of polycrystalline (SiC)1-x(AlN)x solid solution (x = 0.25 and x=1) at 2100-2300 K in nitrogen atmosphere and at atmosphere pressure.

Anglický abstrakt

Obtaining of solid solutions of SiC-AlN system with predictable composition and with expected physical-chemical properties is only possible on the basis of whole and detail investigation of interaction character between components of solid solution and by study of connection between composition and properties. The objects of this study are samples of thin films of aluminum nitride and its solid solutions formatted on silicon carbide substrates by sublimation of source of polycrystalline (SiC)1-x(AlN)x solid solution (x = 0.25 and x=1) at 2100-2300 K in nitrogen atmosphere and at atmosphere pressure.

Klíčová slova

sublimation, solid solution, thin layer, source, target

Klíčová slova v angličtině

sublimation, solid solution, thin layer, target

Autoři

BILALOV, B.; KARDASHOVA, G.; ABDURAZAKOV, A.; SOBOLA, D.; ARKHIPOV, A.

Rok RIV

2011

Vydáno

4. 5. 2011

Nakladatel

Southwest state university

Místo

Kursk

ISBN

978-5-7681-0642-3

Kniha

Proceedings of Internationalscientific conference: Advanced technologies, equipment and analytical systems for material sciences and nanomaterials

Edice

K.V.Kozitov

Číslo edice

4.05.2011

Strany od

829

Strany do

831

Strany počet

3

BibTex

@inproceedings{BUT89667,
  author="Bilal {Bilalov} and Gulnara {Kardashova} and Abdula {Abdurazakov} and Dinara {Sobola} and Alexandr {Arkhipov}",
  title="Peculiarities of the obtaining process of silicon carbide and aluminum nitride",
  booktitle="Proceedings of Internationalscientific conference: Advanced technologies, equipment and analytical systems for material sciences and nanomaterials",
  year="2011",
  series="K.V.Kozitov",
  number="4.05.2011",
  pages="829--831",
  publisher="Southwest state university",
  address="Kursk",
  isbn="978-5-7681-0642-3"
}