Detail publikace

Plasma polymer films of controlled physical and chemical properties

ČECH, V.

Originální název

Plasma polymer films of controlled physical and chemical properties

Typ

přednáška

Jazyk

angličtina

Originální abstrakt

Plasma polymer films were deposited from organosilicon monomers (hexamethyldisiloxane, vinyltriethoxysilane, and tetra-vinylsilane (pure or in a mixture with oxygen gas) by pulsed plasma at different power (0.05–40 W). The deposited materials in the form of hydrogenated amorphous carbon-silicon oxide (a-SiOC:H) alloy are discussed with respect to their chemical, optical, mechanical, and surface properties controlled by pulsed plasma.

Klíčová slova

thin films, PECVD

Autoři

ČECH, V.

Vydáno

31. 7. 2012

Místo

National Taiwan University of Science and Technology, Taipei, Taiwan

BibTex

@misc{BUT97299,
  author="Vladimír {Čech}",
  title="Plasma polymer films of controlled physical and chemical properties",
  year="2012",
  address="National Taiwan University of Science and Technology, Taipei, Taiwan",
  note="lecture"
}