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ČECH, V.
Originální název
Plasma polymer films of controlled physical and chemical properties
Typ
přednáška
Jazyk
angličtina
Originální abstrakt
Plasma polymer films were deposited from organosilicon monomers (hexamethyldisiloxane, vinyltriethoxysilane, and tetra-vinylsilane (pure or in a mixture with oxygen gas) by pulsed plasma at different power (0.05–40 W). The deposited materials in the form of hydrogenated amorphous carbon-silicon oxide (a-SiOC:H) alloy are discussed with respect to their chemical, optical, mechanical, and surface properties controlled by pulsed plasma.
Klíčová slova
thin films, PECVD
Autoři
Vydáno
31. 7. 2012
Místo
National Taiwan University of Science and Technology, Taipei, Taiwan
BibTex
@misc{BUT97299, author="Vladimír {Čech}", title="Plasma polymer films of controlled physical and chemical properties", year="2012", address="National Taiwan University of Science and Technology, Taipei, Taiwan", note="lecture" }