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CHMELA, O. STARÝ, J. ŠUBARDA, J. ČUDEK, P. PRÁŠEK, J. ČÍŽEK, J.
Originální název
Polyethylenterepthalate surface pretreatment
Typ
konferenční sborník (ne článek)
Jazyk
angličtina
Originální abstrakt
Polyethylenterepthalate (PET) pretreatment is one of the most important steps for reliable copper conductive structure realization. Two types of pretreatments were tested. Chemical pretreatment with NaOH and physical pretreatment with plasma. Thin copper layer on PET surface was realized with cathode Cu sputtering. Photolithography techniques were used for preparing open areas for electrochemical copper plating and than differential Cu etching for conductive structures formation. Properties of pretreatments were evaluated with different methods: AFM, contact angle measurement, surface energies calculation and scratch test.
Klíčová slova
Polyehthylenterepthalate (PET), pretreatment, cathode Cu sputtering, AFM method, contact angle, scratch test, surface energy
Autoři
CHMELA, O.; STARÝ, J.; ŠUBARDA, J.; ČUDEK, P.; PRÁŠEK, J.; ČÍŽEK, J.
Rok RIV
2013
Vydáno
26. 6. 2013
Nakladatel
Vysoké učení technické v Brně
Místo
Brno
ISBN
978-80-214-4754-7
Kniha
Electronic Devices and Systems, IMAPS CS International Conference 2013
Edice
1
Číslo edice
Strany od
205
Strany do
209
Strany počet
5
BibTex
@proceedings{BUT101211, editor="Ondřej {Chmela} and Jiří {Starý} and Jiří {Šubarda} and Pavel {Čudek} and Jan {Prášek} and Jan {Čížek}", title="Polyethylenterepthalate surface pretreatment", year="2013", series="1", number="1", pages="205--209", publisher="Vysoké učení technické v Brně", address="Brno", isbn="978-80-214-4754-7" }