Detail publikace

Comparison of imaging with SE ionisation and BSE scintillation detector in ESEM

AUTRATA, R., SCHAUER, P., NEDĚLA, V., HORKÝ, D.

Originální název

Comparison of imaging with SE ionisation and BSE scintillation detector in ESEM

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Environmental scanning electron microscopy (ESEM) or low-vacuum scanning electron microscopy (LV SEM) enables the visualisation of samples in a gaseous environment at the pressure of the specimen chamber from 1 Pa to over 1000 Pa. Detection of signal electrons, namely secondary electrons (SE) cannot be realised in a gaseous environment of the specimen chamber in the same way as for the high vacuum SEM, because high voltage of the Everhart-Thornley detector is not compatible with the conductance of the low vacuum environment [1]. For this reason, gaseous ions which are ionised by SE from the specimen are used for the detection in ESEM. For the detection of the backscattered electrons (BSES), conventional scintillation detector is the best to use.

Klíčová slova

Comparison, SE, ionisation, BSE, scintillation, ESEM

Autoři

AUTRATA, R., SCHAUER, P., NEDĚLA, V., HORKÝ, D.

Vydáno

1. 1. 2003

Místo

Pula

Strany od

487

Strany do

488

Strany počet

2

URL

UPT AV ČR BRNO

BibTex

@inproceedings{BUT10733,
  author="Rudolf {Autrata} and Vilém {Neděla} and Drahomír {Horký} and Petr {Schauer}",
  title="Comparison of imaging with SE ionisation and BSE scintillation detector in ESEM",
  booktitle="Proceedings 6th Multinational Congress on Microscopy",
  year="2003",
  number="1",
  pages="2",
  address="Pula",
  url="UPT AV ČR BRNO"
}