Detail publikace

Measurement of thickness distribution, optical constants and roughness parameters of rough non-uniform ZnSe thin films

NEČAS, D. OHLÍDAL, I. FRANTA, D. ČUDEK, V. OHLÍDAL, M. VODÁK, J.

Originální název

Measurement of thickness distribution, optical constants and roughness parameters of rough non-uniform ZnSe thin films

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Epitaxial ZnSe thin films exhibiting two important defects, i.e., boundary roughness and thicknessnonuniformity, prepared on GaAs substrates, are optically characterized using a combination of varia-ble-angle spectroscopic ellipsometry, spectroscopic near-normal reflectometry, and imaging spectroscopicreflectometry (ISR). The influence of boundary roughness is incorporated into optical quantity formulasby the Rayleigh–Rice theory. Thickness nonuniformity is included using averaging of the unnormalizedMueller matrices. The dispersion model of the optical constants of the ZnSe films is based on paramet-rization of the joint density of electronic states. Very thin overlayers represented by thin films with iden-tically rough boundaries are taken into account on the upper boundaries of the ZnSe films. Standardoptical techniques are used to determine the spectral dependencies of the optical constants of the ZnSefilms, together with the parameters of roughness and thickness nonuniformity. ISR is then used to findthe maps of the local thickness and local rms value of height irregularities. The values of roughnessparameters, determined using the standard techniques and ISR, are verified by a comparison withresults obtained by atomic force microscopy

Klíčová slova

Thin films; Roughness; Ellipsometry and polarimetry; Spectroscopy, visible; Imaging systems

Autoři

NEČAS, D.; OHLÍDAL, I.; FRANTA, D.; ČUDEK, V.; OHLÍDAL, M.; VODÁK, J.

Rok RIV

2014

Vydáno

22. 8. 2014

Nakladatel

Optical Society of America

Místo

Washington DC, USA

ISSN

1559-128X

Periodikum

Applied Optics

Ročník

53

Číslo

25

Stát

Spojené státy americké

Strany od

5606

Strany do

5614

Strany počet

8

BibTex

@article{BUT109001,
  author="David {Nečas} and Ivan {Ohlídal} and Daniel {Franta} and Vladimír {Čudek} and Miloslav {Ohlídal} and Jiří {Vodák}",
  title="Measurement of thickness distribution, optical constants and roughness parameters of rough non-uniform ZnSe thin films",
  journal="Applied Optics",
  year="2014",
  volume="53",
  number="25",
  pages="5606--5614",
  doi="10.1364/AO.53.005606",
  issn="1559-128X"
}