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BÍLEK, M. HLAVATÁ, P. VYROUBAL, P.
Originální název
Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
The article describes the analysis of the specimen chamber in environmental scanning electron microscope AQUASEM II. It was designed six concepts of specimen chamber surrounding the sample holder. The concepts differ in the shape of the sample holder and the entry into the differentially pumped chamber. The purpose was to optimize the area surrounding the sample for minimizing of the speed of the gas flow in nearest surrounding of the sample for reducing of the speed of the sample drying
Klíčová slova
ANSYS, EREM, AQUASEM II
Autoři
BÍLEK, M.; HLAVATÁ, P.; VYROUBAL, P.
Vydáno
7. 12. 2016
ISBN
978-80-214-5109-4
Kniha
ECS Transactions
ISSN
1938-5862
Periodikum
Stát
Spojené státy americké
Strany od
267
Strany do
273
Strany počet
6
BibTex
@inproceedings{BUT129482, author="Michal {Bílek} and Pavla {Šabacká} and Petr {Vyroubal}", title="Analysis of the Gas Flow in the Specimen Chamber of the Environmental Scanning Electron Microscope", booktitle="ECS Transactions", year="2016", journal="ECS Transactions", pages="267--273", doi="10.1149/07401.0267ecst", isbn="978-80-214-5109-4", issn="1938-5862" }