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CHMELA, O. SADÍLEK, J. SAMÀ, J. ROMANO-RODRIGUEZ, A. VALLEJOS VARGAS, S. HUBÁLEK, J.
Originální název
Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
Nanosensors systems comprised of an array of parallel-connected single-nanowires across electrodes with finger-widths, closely related to the diameter of gas sensitive WO3 nanowire are developed. The processing steps for the fabrication of these systems include electron-beam lithography, direct writing laser lithography, metallization, etching, dielectrophoresis, and aerosol assisted chemical vapour deposition, among others. The functionality of these systems in resistive configuration towards ethanol and nitrogen dioxide is evaluated. Results indicate higher sensor responses at 250°C and less signal to noise by applying constant currents of 50 nA. For these conditions, the sensor systems demonstrate reproducible responses to each analyte, with higher response to low concentrations of nitrogen dioxide (0.2, 1, 2.5 ppm), as opposed to ethanol (2.5, 10, 100 ppm), and in line with the literature.
Klíčová slova
NOx ; Nanosensors ; Sensors ; Lithography ; Bioalcohols ; Chemical vapor deposition ; Dielectrophoresis ; Electrodes ; Electron beams ; Etching
Autoři
CHMELA, O.; SADÍLEK, J.; SAMÀ, J.; ROMANO-RODRIGUEZ, A.; VALLEJOS VARGAS, S.; HUBÁLEK, J.
Vydáno
20. 6. 2017
Nakladatel
SPIE Nanotechnology VIII
Místo
Barcelona, Spain
ISBN
9781510609976
Kniha
Proc. SPIE 10248, Nanotechnology VIII
Edice
Volume 10248
ISSN
0277-786X
Periodikum
Proceedings of SPIE
Ročník
10248
Číslo
102480F-1
Stát
Spojené státy americké
Strany od
1
Strany do
7
Strany počet
BibTex
@inproceedings{BUT136430, author="CHMELA, O. and SADÍLEK, J. and SAMÀ, J. and ROMANO-RODRIGUEZ, A. and VALLEJOS VARGAS, S. and HUBÁLEK, J.", title="Nanosensor array systems based on single functional wires selectively integrated and their sensing properties to C2H6O and NO2", booktitle="Proc. SPIE 10248, Nanotechnology VIII", year="2017", series="Volume 10248", journal="Proceedings of SPIE", volume="10248", number="102480F-1", pages="1--7", publisher="SPIE Nanotechnology VIII", address="Barcelona, Spain", doi="10.1117/12.2265000", isbn="9781510609976", issn="0277-786X" }