Detail publikace

Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

HÁJKOVÁ, V. MAXA, J. HLAVATÁ, P. BÍLEK, M.

Originální název

Design of the shape of the experimental chamber for the analysis of the pressure layout in the differential pumped chamber

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This article is based on a study by Dr. Danilatos, where pumping of the differential pumped chamber is solved using the Monte Carlo statistical method. Similar results were obtained using the Ansys Fluent system. Theoretical computations as Dr. Danilatos and comparative studies are performed on theoretical shape. Simulations were made to obtain the shape of an experimental chamber with complete pumping shapes so that its shaping and pumping would ensure such a flow of gas in order to ensure the same distribution of pressure in the experimental chamber in the area under investigation as in the theoretical shape.

Klíčová slova

Dr. Danilatos, Monte Carlo, ANSYS Fluent, differentially pumped chamber, environmental scanning electron microscope

Autoři

HÁJKOVÁ, V.; MAXA, J.; HLAVATÁ, P.; BÍLEK, M.

Vydáno

30. 11. 2017

Nakladatel

Electrochemical Society Inc.

ISBN

9781607688297

Kniha

ECS Transactions

Edice

81

Číslo edice

1

ISSN

1938-5862

Periodikum

ECS Transactions

Ročník

81

Číslo

1

Stát

Spojené státy americké

Strany od

329

Strany do

335

Strany počet

5

URL

https://iopscience.iop.org/article/10.1149/08101.0329ecst/pdf

BibTex

@inproceedings{BUT140329,
  author="Vlastimila {Hájková} and Jiří {Maxa} and Pavla {Šabacká} and Michal {Bílek}",
  title="Design of the shape of the experimental chamber for the analysis of the pressure
layout in the differential pumped chamber",
  booktitle="ECS Transactions",
  year="2017",
  series="81",
  journal="ECS Transactions",
  volume="81",
  number="1",
  pages="329--335",
  publisher="Electrochemical Society Inc.",
  doi="10.1149/08101.0329ecst",
  isbn="9781607688297",
  issn="1938-5862",
  url="https://iopscience.iop.org/article/10.1149/08101.0329ecst/pdf"
}