Detail publikace

Displacement interferometry with stabilization of wavelength in air

LAZAR, J., HOLÁ, M., CIP, O., CIZEK, M., HRABINA, J., BUCHTA, Z.

Originální název

Displacement interferometry with stabilization of wavelength in air

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

We present a concept of suppression of the influence of variations of the refractive index of air in displacement measuring interferometry. The principle is based on referencing of wavelength of the coherent laser source in atmospheric conditions instead of traditional stabilization of the optical frequency and indirect evaluation of the refractive index of air. The key advantage is in identical beam paths of the position measuring interferometers and the interferometer used for the wavelength stabilization. Design of the optical arrangement presented here to verify the concept is suitable for real interferometric position sensing in technical practice especially where a high resolution measurement within some limited range in atmospheric conditions is needed, e.g. in nanometrology.

Klíčová slova

Instrumentation, measurement and metrology, interferometry

Autoři

LAZAR, J., HOLÁ, M., CIP, O., CIZEK, M., HRABINA, J., BUCHTA, Z.

Vydáno

29. 11. 2012

ISSN

1094-4087

Periodikum

OPTICS EXPRESS

Ročník

20

Číslo

25

Stát

Spojené státy americké

Strany od

27830

Strany do

27837

Strany počet

8

BibTex

@article{BUT146740,
  author="Josef {Lazar} and Miroslava {Holá} and Ondřej {Číp} and Martin {Čížek} and Jan {Hrabina} and Zdeněk {Buchta}",
  title="Displacement interferometry with stabilization of wavelength in air",
  journal="OPTICS EXPRESS",
  year="2012",
  volume="20",
  number="25",
  pages="27830--27837",
  issn="1094-4087"
}