Detail publikace

Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry

OHLÍDAL, M. VODÁK, J. NEČAS, D.

Originální název

Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry

Typ

kapitola v knize

Jazyk

angličtina

Originální abstrakt

Non-microscopic imaging spectroscopic reflectometry for optical characterization of thin films is described. This technique is primarily intended for characterization of thin films with area non-uniformity in their optical properties. The characterization can be carried out along a relatively large area of the measured films. The motivation for the development and exploitation of this technique is also discussed. The essential features and the implementation of the technique are provided together with the basic experimental set up of imaging spectroscopic reflectometers. The way of acquiring the experimental data is described. The experimental data processing methods are classified from the point of view of the way in which information contained in the image of the film measured is exploited. Furthermore, specific examples of results measured by imaging spectroscopic reflectometry in the field of thin film optics are introduced. At the end, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.

Klíčová slova

imaging spectroscopic reflectometry, non-uniform thin films

Autoři

OHLÍDAL, M.; VODÁK, J.; NEČAS, D.

Vydáno

16. 4. 2018

Nakladatel

Springer International Publishing AG Part of Springer Nature

Místo

Cham, Switzerland

ISBN

978-3-319-75324-9

Kniha

Optical Characterization of Thin Solid Films

Strany od

107

Strany do

141

Strany počet

34

BibTex

@inbook{BUT155268,
  author="Miloslav {Ohlídal} and Jiří {Vodák} and David {Nečas}",
  title="Optical Characterization Of Thin Films by Means of Imaging Spectroscopic Reflectometry",
  booktitle="Optical Characterization of Thin Solid Films",
  year="2018",
  publisher="Springer International Publishing AG Part of Springer Nature",
  address="Cham, Switzerland",
  pages="107--141",
  isbn="978-3-319-75324-9"
}