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KNÁPEK, A. ŠIKULA, J. BARTLOVÁ, M.
Originální název
Fluctuations of focused electron beam in a conventional SEM
Typ
článek v časopise ve Web of Science, Jimp
Jazyk
angličtina
Originální abstrakt
Noise diagnostics was performed on a tungsten hairpin cathode that was used in conventional scanning electron microscope (SEM) which operates in a high vacuum. The focused beam was firstly measured and its power spectrum obtained in order to characterize its slope in the lower frequencies which are connected with the events occurring on the cathode surface during the emission of electrons. Further experiments involved additional noise measurements which evaluated electron beam with altering beam energy, in particular at 5 kV, 10 kV and 20 kV up to 30 kV; with and without electron beam scanning involved and with different levels of cathode heating. Obtained results were evaluated in relation to a 1/f type noise component, generation-recombination process on the cathode surface, on the shot noise and on the velocity fluctuations caused by the ion oscillations. Achieved results were discussed.
Klíčová slova
Thermal electron emission, electronic noise, low-energy electron beam
Autoři
KNÁPEK, A.; ŠIKULA, J.; BARTLOVÁ, M.
Vydáno
20. 5. 2019
Nakladatel
ELSEVIER SCIENCE BV
Místo
AMSTERDAM, NETHERLANDS
ISSN
0304-3991
Periodikum
Ultramicroscopy
Ročník
204
Číslo
1
Stát
Nizozemsko
Strany od
49
Strany do
54
Strany počet
6
URL
https://www.sciencedirect.com/science/article/abs/pii/S0304399119300683
BibTex
@article{BUT159341, author="Alexandr {Knápek} and Josef {Šikula} and Milada {Bartlová}", title="Fluctuations of focused electron beam in a conventional SEM", journal="Ultramicroscopy", year="2019", volume="204", number="1", pages="49--54", doi="10.1016/j.ultramic.2019.05.008", issn="0304-3991", url="https://www.sciencedirect.com/science/article/abs/pii/S0304399119300683" }