Detail publikace

Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy

KLAPETEK, P. CHARVÁTOVÁ CAMPBELL, A. BURŠÍKOVÁ, V.

Originální název

Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

We present a numerical approach for estimation of the probe-sample elastic deformation for higher contact forces and/or smaller probe apex radii in Scanning Probe Microscopy (SPM) measurements. It is based on a massspring model implemented on a graphics card in order to perform very high numbers of individual force-distance curves calculations in reasonable time, forming virtual profiles or virtual SPM images. The model is suitable for predicting the mechanical response of the probe and sample in SPM mechanical properties mapping regimes and for estimating the uncertainty sources related to probe-sample elastic deformation in dimensional nanometrology. As the model is based on using regular orthogonal mesh formed from the scanned surface topography, it can be also used as preprocessor for various pixel by pixel physical quantities calculations using Finite Difference Method, namely for the energy transfer between probe and sample, where a realistic probe- sample contact formation needs to be taken into account. Model performance is demonstrated via comparison to analytical solutions for simple contact mechanics tasks and its possibilities for SPM data interpretation are illustrated on measurements on simple reference structures, such as step edges or quantum dots.

Klíčová slova

Scanning Probe Microscopy; Uncertainty; Elastic deformation

Autoři

KLAPETEK, P.; CHARVÁTOVÁ CAMPBELL, A.; BURŠÍKOVÁ, V.

Vydáno

19. 3. 2019

Nakladatel

ELSEVIER

Místo

AMSTERDAM

ISSN

0304-3991

Periodikum

Ultramicroscopy

Ročník

201

Číslo

1

Stát

Nizozemsko

Strany od

18

Strany do

18

Strany počet

10

URL

https://www.sciencedirect.com/science/article/pii/S0304399118302638

BibTex

@article{BUT160857,
  author="Petr {Klapetek} and Anna {Charvátová Campbell} and Vilma {Buršíková}",
  title="Fast mechanical model for probe-sample elastic deformation estimation in scanning probe microscopy",
  journal="Ultramicroscopy",
  year="2019",
  volume="201",
  number="1",
  pages="18--18",
  doi="10.1016/j.ultramic.2019.03.010",
  issn="0304-3991",
  url="https://www.sciencedirect.com/science/article/pii/S0304399118302638"
}