Detail publikace

Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation

JUŘÍK, K. STARÝ, J. DREXLER, P.

Originální název

Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

This paper presents a design, analysis and optimization of birdcage resonators employed in a novel radiofrequency plasma source. Three resonators were simulated and fabricated. The resonators differ in their design and in the different materials of used dielectric - polyimide and polytetrafluorethylene (PTFE). The resonance frequency of fabricated samples possesses a maximal error of 2.2% compared to the simulated values. The performance in plasma excitation is related to the electrical parameters, while the best performing resonator (PTFE-based) exhibits the maximum real impedance of 644.3 ohm at the resonance frequency and the 799.5 V/m electric field strength. This resonator shows the best power efficiency in a plasma ignition experiment. The resonator ignited the discharge at ca. 1 Pa of ambient air atmosphere with only 0.34 W of input radiofrequency power.

Klíčová slova

Birdcage resonator; resonance network; plasma source; impedance matching; distributed capacity

Autoři

JUŘÍK, K.; STARÝ, J.; DREXLER, P.

Vydáno

20. 12. 2022

Nakladatel

SPOLECNOST PRO RADIOELEKTRONICKE INZENYRSTVI

Místo

PRAHA

ISSN

1210-2512

Periodikum

Radioengineering

Ročník

32

Číslo

1

Stát

Česká republika

Strany od

44

Strany do

50

Strany počet

7

URL

https://www.radioeng.cz/fulltexts/2023/23_01_0044_0050.pdf

BibTex

@article{BUT181609,
  author="Karel {Juřík} and Jiří {Starý} and Petr {Drexler}",
  title="Design and Fabrication of Birdcage Resonators for Low-pressure Plasma Excitation",
  journal="Radioengineering",
  year="2022",
  volume="32",
  number="1",
  pages="44--50",
  doi="10.13164/re.2023.0044",
  issn="1210-2512",
  url="https://www.radioeng.cz/fulltexts/2023/23_01_0044_0050.pdf"
}