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ERICH, M. GLOGINJIC, M. MRAVIK, Ž. VRBAN, B. ČERBA, Š. LÜLEY, J. NEČAS, V. FILOVÁ, V. KATOVSKÝ, K. ŠŤASTNÝ, O. PETROVIC, S.
Originální název
Dependence of the 6H - SiC induced amorphization on the ion beam implanted fluence
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
The 6H-SiC samples have been implanted by 4 MeV C and Si ions in the (0001) channeling direction to the sets of multiple implantation fluences. These samples were analyzed via Elastic Backscattering Spectroscopy in the channeling mode (EBS/C) using 1.725 MeV proton beam, from which SiC amorphization depth profiles and averaged integral 6H-SiC amorphization have been obtained. The averaged integral 6H-SiC crystal amorphization vs implanted fluence dependence has been determined for both types of implanted ions. From these dependences, the 6H-SiC integral crystal amorphization vs. implanted fluence/type of implanted atom assessment model have been proposed.
Klíčová slova
6H-SiC; Si ion irradiation; Elastic Backscattering Spectroscopy; ion implementation
Autoři
ERICH, M.; GLOGINJIC, M.; MRAVIK, Ž.; VRBAN, B.; ČERBA, Š.; LÜLEY, J.; NEČAS, V.; FILOVÁ, V.; KATOVSKÝ, K.; ŠŤASTNÝ, O.; PETROVIC, S.
Vydáno
5. 5. 2023
Nakladatel
American Institute of Physics Inc.
Místo
AIP College Park, Maryland, USA Physical Science Publishing - AIP Publishing LLC Woodbury, Long Island, NY, USA
ISBN
978-0-7354-4479-9
Kniha
AIP Conference Proceedings 2778 - 27th Conference on Applied Physics of Condensed Matter (APCOM 2022)
Edice
2778
Číslo edice
1
ISSN
0094-243X
Periodikum
AIP conference proceedings
Ročník
Číslo
Stát
Spojené státy americké
Strany od
Strany do
5
Strany počet
URL
https://pubs.aip.org/aip/acp/article/2778/1/060002/2888698/
BibTex
@inproceedings{BUT184138, author="Marko {Erich} and Marko {Gloginjic} and Željko {Mravik} and Branislav {Vrban} and Štefan {Čerba} and Jakub {Lüley} and Vladimír {Nečas} and Vendula {Filová} and Karel {Katovský} and Ondřej {Šťastný} and Srdjan {Petrovic}", title="Dependence of the 6H - SiC induced amorphization on the ion beam implanted fluence", booktitle="AIP Conference Proceedings 2778 - 27th Conference on Applied Physics of Condensed Matter (APCOM 2022)", year="2023", series="2778", journal="AIP conference proceedings", volume="2778", number="1", pages="1--5", publisher="American Institute of Physics Inc.", address="AIP College Park, Maryland, USA Physical Science Publishing - AIP Publishing LLC Woodbury, Long Island, NY, USA", doi="10.1063/5.0136670", isbn="978-0-7354-4479-9", issn="0094-243X", url="https://pubs.aip.org/aip/acp/article/2778/1/060002/2888698/" }