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GLOGINJIC, M. ERICH, M. MRAVIK, Ž. VRBAN, B. ČERBA, Š. LÜLEY, J. FILOVÁ, V. KATOVSKÝ, K. ŠŤASTNÝ, O. BURIAN, J. PETROVIC, S.
Originální název
Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence
Typ
článek ve sborníku mimo WoS a Scopus
Jazyk
angličtina
Originální abstrakt
During the ion implantation process, regardless if it was attentional or not, amorphization will be introduced into the crystal structure. Depending on the chosen ions, different quantities of the amorphization will be introduced for the same applied fluences. In order to estimate the total amorphization of the SiC crystal for different ions and fluences combination, an assessment model was proposed. For this purpose, 4 MeV carbon and silicon ions with multiple fluences were implanted in the axial direction of a 6H-SiC single crystal. The amorphization depth distributions were obtained by Elastic Backscattering Spectroscopy/channeling spectra analysis via Channeling SIMulation (CSIM) phenomenological computer code. As a result, relation of the total induced amorphization and implantation fluences for carbon and silicon ions were obtained.
Klíčová slova
ion implantation; SiC; carbon ions; silicon ions; 4 MeV; Elastic Backscattering Spectroscopy
Autoři
GLOGINJIC, M.; ERICH, M.; MRAVIK, Ž.; VRBAN, B.; ČERBA, Š.; LÜLEY, J.; FILOVÁ, V.; KATOVSKÝ, K.; ŠŤASTNÝ, O.; BURIAN, J.; PETROVIC, S.
Vydáno
22. 9. 2022
Nakladatel
Serbian Ceramic Society
Místo
Belgrade, Republic of Serbia
ISBN
978-86-915627-9-3
Kniha
Proc. of 10th Serbian Ceramic Society Conference ADVANCED CERAMICS AND APPLICATION X "New Frontiers in Multifunctional Material Science and Processing"
Edice
1
Číslo edice
Strany počet
URL
https://vinar.vin.bg.ac.rs/handle/123456789/10822
BibTex
@inproceedings{BUT184164, author="Marko {Gloginjic} and Marko {Erich} and Željko {Mravik} and Branislav {Vrban} and Štefan {Čerba} and Jakub {Lüley} and Vendula {Filová} and Karel {Katovský} and Ondřej {Šťastný} and Jiří {Burian} and Srdjan {Petrovic}", title="Correlation of the total induced amorphization in SiC crystal with the ion implantation fluence", booktitle="Proc. of 10th Serbian Ceramic Society Conference ADVANCED CERAMICS AND APPLICATION X {"}New Frontiers in Multifunctional Material Science and Processing{"}", year="2022", series="1", number="1", pages="1", publisher="Serbian Ceramic Society", address="Belgrade, Republic of Serbia", isbn="978-86-915627-9-3", url="https://vinar.vin.bg.ac.rs/handle/123456789/10822" }