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BURDA, D. ALLAHAM, M. HORÁČEK, M. KNÁPEK, A.
Originální název
Study of Dielectric Nanolayers and Multilayer Coated Emitters
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
We report a fabrication method of multilayer coating of single tip field emitters. Tungsten field emitters coated with a multilayer of refractory oxides such as Al2O3 , HfO2 , which act as an additional potential barrier in the metal-vacuum system. Introducing additional barriers to the emitter's metal vacuum interface system can alter its emission characteristics. Thin oxide barriers were prepared using a recipe that involved the use of low-temperature atomic layer deposition. The parameters of the grown layers were studied by local electron atom probe tomography, field ion microscopy, and scanning transmission microscopy.
Klíčová slova
Cold Field Emission; Multilayer Dielectric Structure; Tungsten Tips; Electron Tunneling; Atomic Layer Deposition
Autoři
BURDA, D.; ALLAHAM, M.; HORÁČEK, M.; KNÁPEK, A.
Vydáno
27. 7. 2023
Nakladatel
IEEE
ISBN
979-8-3503-0143-4
Kniha
2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)
Strany od
53
Strany do
54
Strany počet
2
URL
https://ieeexplore.ieee.org/document/10188949
BibTex
@inproceedings{BUT184439, author="Daniel {Burda} and Mohammad Mahmoud {Allaham} and Miroslav {Horáček} and Alexandr {Knápek}", title="Study of Dielectric Nanolayers and Multilayer Coated Emitters", booktitle="2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)", year="2023", pages="53--54", publisher="IEEE", doi="10.1109/IVNC57695.2023.10188949", isbn="979-8-3503-0143-4", url="https://ieeexplore.ieee.org/document/10188949" }