Detail publikace

Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines

KOVAŘÍK, M. CITTERBERG, D. PAIVA DE ARAÚJO, E. ŠIKOLA, T. KOLÍBAL, M.

Originální název

Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

To satisfy the needs of the current technological world that demands high performance and efficiency, a deep understanding of the whole fabrication process of electronic devices based on low-dimensional materials is necessary for rapid prototyping of devices. The fabrication processes of such nanoscale devices often include exposure to an electron beam. A field effect transistor (FET) is a core device in current computation technology, and FET configuration is also commonly used for extraction of electronic properties of low-dimensional materials. In this experimental study, we analyze the effect of electron beam exposure on electrical properties of individual WS2 nanotubes in the FET configuration by in-operando transport measurements inside a scanning electron microscope. Upon exposure to the electron beam, we observed a significant change in the resistance of individual substrate-supported nanotubes (by a factor of 2 to 14) that was generally irreversible. The resistance of each nanotube did not return to its original state even after keeping it under ambient conditions for hours to days. Furthermore, we employed Kelvin probe force microscopy to monitor surface potential and identified that substrate charging is the primary cause of changes in nanotubes' resistance. Hence, extra care should be taken when analyzing nanostructures in contact with insulating oxides that are subject to electron exposure during or after fabrication.

Klíčová slova

WS2; nanotubes; electrical properties; electron beam irradiation; prototyping

Autoři

KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M.

Vydáno

13. 12. 2024

Nakladatel

AMER CHEMICAL SOC

Místo

WASHINGTON

ISSN

2637-6113

Periodikum

ACS Applied Electronic Materials

Ročník

6

Číslo

12

Stát

Spojené státy americké

Strany od

8776

Strany do

8782

Strany počet

7

URL

https://pubs.acs.org/doi/10.1021/acsaelm.4c01450

BibTex

@article{BUT193856,
  author="Martin {Kovařík} and Daniel {Citterberg} and Estácio {Paiva de Araújo} and Tomáš {Šikola} and Miroslav {Kolíbal}",
  title="Understanding the Effect of Electron Irradiation on WS2 Nanotube Devices to Improve Prototyping Routines",
  journal="ACS Applied Electronic Materials",
  year="2024",
  volume="6",
  number="12",
  pages="8776--8782",
  doi="10.1021/acsaelm.4c01450",
  issn="2637-6113",
  url="https://pubs.acs.org/doi/10.1021/acsaelm.4c01450"
}