Detail publikace

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

GREGOR, J., JAKUBOVÁ, I., ŠENK, J., HRABOVSKÝ, M., KOLMAN, B., KONRÁD, M., KOPECKÝ, V., VORLÍČEK, V., POKORNÝ, J.

Originální název

Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio of flow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of films was investigated.

Klíčová slova

plasma deposition,diamond,plasma jet

Autoři

GREGOR, J., JAKUBOVÁ, I., ŠENK, J., HRABOVSKÝ, M., KOLMAN, B., KONRÁD, M., KOPECKÝ, V., VORLÍČEK, V., POKORNÝ, J.

Rok RIV

2002

Vydáno

1. 6. 2002

ISSN

0011-4626

Periodikum

Czechoslovak Journal of Physics

Ročník

52

Číslo

suppl. D

Stát

Česká republika

Strany od

878

Strany do

885

Strany počet

8

BibTex

@article{BUT40867,
  author="Jan {Gregor} and Ivana {Jakubová} and Josef {Šenk} and Milan {Hrabovský} and Blahoslav {Kolman} and Miloš {Konrád} and Vladimír {Kopecký} and V. {Vorlíček} and J. {Pokorný}",
  title="Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure",
  journal="Czechoslovak Journal of Physics",
  year="2002",
  volume="52",
  number="suppl. D",
  pages="8",
  issn="0011-4626"
}