Detail publikace

Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry

OHLÍDAL, I. OHLÍDAL, M. NEČAS, D. FRANTA, D. BURŠÍKOVÁ, V.

Originální název

Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry

Typ

článek v časopise ve Web of Science, Jimp

Jazyk

angličtina

Originální abstrakt

The combined optical method enabling us to perform the complete optical characterisation of weakly absorbing non-uniform thin films is described. This method is based on the combination of standard variable angle spectroscopic ellipsometry, standard spectroscopic reflectometry at near normal incidence and spectroscopic imaging reflectometry applied at normal incidence. The spectral dependences of the optical constants are determined using the non-imaging methods by using the dispersion model based on parametrisation of the density of electronic states. The local thickness distribution is then determined by imaging reflectometry. The method is illustrated by means of the complete optical characterisation of SiOxCyHz thin films.

Klíčová slova

Optical characterisation; Non-uniform films; Spectroscopic ellipsometry; Spectroscopic reflectometry; Spectroscopic imaging reflectometry

Autoři

OHLÍDAL, I.; OHLÍDAL, M.; NEČAS, D.; FRANTA, D.; BURŠÍKOVÁ, V.

Rok RIV

2011

Vydáno

28. 2. 2011

Nakladatel

ELSEVIER SCIENCE SA

Místo

LAUSANNE

ISSN

0040-6090

Periodikum

Thin Solid Films

Ročník

519

Číslo

9

Stát

Nizozemsko

Strany od

2874

Strany do

2876

Strany počet

3

BibTex

@article{BUT50347,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and David {Nečas} and Daniel {Franta} and Vilma {Buršíková}",
  title="Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry",
  journal="Thin Solid Films",
  year="2011",
  volume="519",
  number="9",
  pages="2874--2876",
  issn="0040-6090"
}