Detail publikace

Allan variance analysis on MEMS tilt sensors with different principles of operation

HAVRÁNEK, Z. KLUSÁČEK, S. BENEŠ, P. VÁGNER, M.

Originální název

Allan variance analysis on MEMS tilt sensors with different principles of operation

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Tilt sensing is an important part in absolute position and orientation measurement, e.g. inertial navigation units and tilt detectors. In this paper, the direct comparison of three MEMS tilt sensors with different principle of operation has been carried out and evaluated using Allan Variance (AV) method. Selected samples represent major principles used in MEMS accelerometers on the market - capacitive Analog Devices ADXL203, thermal MEMSIC MXA6500M and piezoresistive Panasonic AGS61231. All devices have similar measurement range and acceleration sensitivity. The results of AV analysis show similar behavior and curve shape in capacitive principle, with the lowest acceleration random walk observed, and in thermal principle, with six times higher bias instability in compare with capacitive principle. The piezoresistive principle has lower velocity random walk, but it is very sensitive to temperature variations, seen in long cluster times.

Klíčová slova

MEMS accelerometer, tilt sensing, Allan variance, thermal accelerometer

Autoři

HAVRÁNEK, Z.; KLUSÁČEK, S.; BENEŠ, P.; VÁGNER, M.

Rok RIV

2011

Vydáno

28. 10. 2011

Nakladatel

IEEE

Místo

Limerick, Ireland

ISBN

978-1-4244-9288-6

Kniha

2011 IEEE SENSORS Proceedings

Číslo edice

1

Strany od

1685

Strany do

1688

Strany počet

4

BibTex

@inproceedings{BUT74701,
  author="Zdeněk {Havránek} and Stanislav {Klusáček} and Petr {Beneš} and Martin {Vágner}",
  title="Allan variance analysis on MEMS tilt sensors with different principles of operation",
  booktitle="2011 IEEE SENSORS Proceedings",
  year="2011",
  number="1",
  pages="1685--1688",
  publisher="IEEE",
  address="Limerick, Ireland",
  isbn="978-1-4244-9288-6"
}