Detail publikace

Ultrasonics spectroscopy of silicon single crystal

SEDLÁK, P. TOFEL, P. SEDLÁKOVÁ, V. MAJZNER, J. ŠIKULA, J. HASSE, L.

Originální název

Ultrasonics spectroscopy of silicon single crystal

Typ

článek v časopise - ostatní, Jost

Jazyk

angličtina

Originální abstrakt

Specimens of Si single crystals with different crystal orientation [100] and [110] were studied by the Electro-Ultrasonic Spectroscopy (EUS) and Resonant Ultrasonic Spectroscopy (RUS). A silicon single crystal is an anisotropic crystal, so its properties are different in different directions in the material relative to the crystal orientation

Klíčová slova

non-destructive testing, silicon single crystal, electro-ultrasonic spectroscopy, resonant ultrasonic spectroscopy

Autoři

SEDLÁK, P.; TOFEL, P.; SEDLÁKOVÁ, V.; MAJZNER, J.; ŠIKULA, J.; HASSE, L.

Rok RIV

2011

Vydáno

12. 12. 2011

Nakladatel

Versita

Místo

Warsaw, Poland

ISSN

0860-8229

Periodikum

METROL MEAS SYST

Ročník

18

Číslo

4

Stát

Polská republika

Strany od

621

Strany do

630

Strany počet

10

BibTex

@article{BUT75545,
  author="Petr {Sedlák} and Pavel {Tofel} and Vlasta {Sedláková} and Jiří {Majzner} and Josef {Šikula} and Lech {Hasse}",
  title="Ultrasonics spectroscopy of silicon single crystal",
  journal="METROL MEAS SYST",
  year="2011",
  volume="18",
  number="4",
  pages="621--630",
  issn="0860-8229"
}