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NEDĚLA, V.
Originální název
Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure
Typ
článek ve sborníku ve WoS nebo Scopus
Jazyk
angličtina
Originální abstrakt
This paper deals with adaptation of the scanning electron microscope (SEM) to the environmental scanning electron microscope (ESEM). ESEM allows work at higher pressure in some parts of the microscope. It focuses especially to the construction and assembly of the differential pumping chamber together with the detector board of the differential pumping chamber and it comments reasons of necessity of the assembly of these parts in the environmental scanning electron microscope.
Klíčová slova
ESEM,DIFFERENTIAL PUMPING CHAMBER, ADAPTATION
Autoři
Vydáno
1. 1. 2003
Místo
Brno
ISBN
80-214-2401-X
Kniha
Proceedings of the International Conference and Competition Student EEICT 2003
Strany od
199
Strany do
203
Strany počet
5
URL
VUT Brno
BibTex
@inproceedings{BUT7908, author="Vilém {Neděla}", title="Construction of Differential Pumping Chamber with Detector Board for Adaptation of Scanning Electron Microscope for Working in Higher Pressure", booktitle="Proceedings of the International Conference and Competition Student EEICT 2003", year="2003", pages="5", address="Brno", isbn="80-214-2401-X", url="VUT Brno" }