Detail publikace

Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

IVANOV, P., LLOBET, E., VILANOVA, X., BREZMES, J., CORREIG, X., HUBÁLEK, J., MALYSZ, K., GRACIA, I., CANÉ, C.

Originální název

Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing was made before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and discussed.

Klíčová slova

gas sensors, micro-hotplate, thick-film, thin-film

Autoři

IVANOV, P., LLOBET, E., VILANOVA, X., BREZMES, J., CORREIG, X., HUBÁLEK, J., MALYSZ, K., GRACIA, I., CANÉ, C.

Vydáno

12. 2. 2003

Nakladatel

Instituto de Microelectrónika de Barcelona CNM-CSIC

Místo

Calella de la Costa, Barcelona, Spain

ISBN

84-607-6771-X

Kniha

4th Conference on Electronic Devices

Strany od

145

Strany do

145

Strany počet

1

BibTex

@inproceedings{BUT8030,
  author="Peter {Ivanov} and Eduard {Llobet} and Xavier {Vilanova} and Jesús {Brezmes} and Xavier {Correig} and Jaromír {Hubálek} and Karel {Malysz} and I. {Gracia} and Carlas {Cané}",
  title="Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors",
  booktitle="4th Conference on Electronic Devices",
  year="2003",
  pages="1",
  publisher="Instituto de Microelectrónika de Barcelona CNM-CSIC",
  address="Calella de la Costa, Barcelona, Spain",
  isbn="84-607-6771-X"
}