Detail publikace

Influence of Functional Resistors on Offset Voltage Noise in Thick-Film Pressure Sensors

SEDLÁKOVÁ, V. MAJZNER, J. SEDLÁK, P. HOLCMAN, V. ŠIKULA, J. SANTO-ZARNIK, M. BELAVIC, D. HROVAT, M.

Originální název

Influence of Functional Resistors on Offset Voltage Noise in Thick-Film Pressure Sensors

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

We are concentrating our effort on the investigation of Low-Temperature Co-fired Ceramic (LTCC)-based ceramic pressure sensors (CPSs) quality and reliability using the low frequency noise measurements. Special test specimens containing thick film resistors of different sizes including four thick-film resistors (0.8 x 0.8 mm2) connected in the Wheatstone bridge were made for the case study by using different thick-film materials and technology variants. In the present work we will discuss the correlation between the functional resistor parameters (resistance and layer thickness, respectively) and the noise level of single resistors, as well as the correlation between the bridge offset voltage fluctuation and the noise of single resistors within the bridge. For given sample geometry the sample resistance increases with decreasing thickness of the resistive layer. Thinner resistors have smaller volume of resistive layer which leads to the increase of 1/f noise component. The discussion how the noise of single resistors is transferred into the total noise of offset voltage on the bridge output is given.

Klíčová slova

Low frequency noise, TFR, pressure sensor, quality, reliability

Autoři

SEDLÁKOVÁ, V.; MAJZNER, J.; SEDLÁK, P.; HOLCMAN, V.; ŠIKULA, J.; SANTO-ZARNIK, M.; BELAVIC, D.; HROVAT, M.

Rok RIV

2012

Vydáno

19. 9. 2012

Nakladatel

MIDEM

Místo

Slovinsko

ISBN

978-961-92933-2-4

Kniha

MIDEM Society for Microelectronic, Electronic Components and Materials - Conference 2012 Proceedings

Strany od

393

Strany do

398

Strany počet

6

BibTex

@inproceedings{BUT95970,
  author="Vlasta {Sedláková} and Jiří {Majzner} and Petr {Sedlák} and Vladimír {Holcman} and Josef {Šikula} and Marina {Santo-Zarnik} and Darko {Belavic} and Marko {Hrovat}",
  title="Influence of Functional Resistors on Offset Voltage Noise in Thick-Film Pressure Sensors",
  booktitle="MIDEM Society for Microelectronic, Electronic Components and Materials - Conference 2012 Proceedings",
  year="2012",
  pages="393--398",
  publisher="MIDEM",
  address="Slovinsko",
  isbn="978-961-92933-2-4"
}