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Project detail
Duration: 01.01.2019 — 31.12.2022
Funding resources
Ministerstvo průmyslu a obchodu ČR - TRIO
- whole funder (2019-05-01 - 2022-12-31)
On the project
Viz cíle níže
Description in EnglishMain aims of submitted project are the following: 1. Total optical characterization of single coating layers used in multilayer systems, that means coating layers of Al2O3, MgF2, HfO2 and SiO2 materials. 2. Development of antireflection coatings on glass substrates with required values of transmittance for wavelengths 213 nm and 248 nm and for normal angle of incidence. Fabrication of samples on the basis of design and optical characterization of these samples. Modification of technological conditions of coating and production of optimized samples. Control of achieved optimization through measurement of spectral dependence of reflectance and transmittance. 3. Development of mirrors with high reflectance on glass substrates with required average reflectance values for wavelengths 248 nm and 213 nm and for 45°angle of incidence. Fabrication of samples on the basis of designs together with optical characterization. Modification of technological conditions of coating and production of optimized samples. Control of achieved optimization through measurement of spectral dependence of reflectance. 4. Development of beam splitter on glass substrates with required p-value of transmittance or for average transmittance for wavelength 248 nm and with required s-value of reflectance for wavelengths 630 nm – 670 nm and for 45°angle of incidence. Fabrication of samples on the basis of design together with optical characterization. Modification of technological conditions of coating and production of optimized samples. Control of achieved optimization through measurement of spectral dependence of reflectance and transmittance. 5. Measurement of internal tensile stress and parameters to characterize mechanical properties of coating layers and multi-layer systems for assessment of lifetime joint with control of surface uniformity of their optical parameters.
KeywordsNávrh a optická charakterizace vrstevnatých systémů; antireflexní pokrytí; zrcadla s vysokou odrazivostí; děliče světelných svazků; zdokonalení technologických postupů; realizace optimalizovaných zrcadel, děličů a antireflexních pokrytí;
Key words in EnglishDesign and optical characterization of multi-layer systems- antireflection coatings, high reflectance mirrors, beam splitters- improvement of technological processes- realization of optimized mirrors, beam splitters and antireflection coatings-
Mark
FV40328
Default language
Czech
People responsible
Ohlídal Miloslav, prof. RNDr., CSc. - principal person responsible
Units
Institute of Physical Engineering- beneficiary (2018-10-11 - not assigned)
Results
NEČAS, D.; KLAPETEK, P.; VALTR, M. Estimation of roughness measurement bias originating from background subtraction. Measurement Science and Technology, 2020, vol. 31, no. 9, p. 094010-1 (094010-15 p.)ISSN: 0957-0233.Detail
NEČAS, D.; VALTR, M.; KLAPETEK, P. How levelling and scan line corrections ruin roughness measurement and how to prevent it. Scientific Reports, 2020, vol. 10, no. 1, p. 1-15. ISSN: 2045-2322.Detail
ŠUSTEK, Š.; VOHÁNKA, J.; OHLÍDAL, I.; OHLÍDAL, M.; ŠULC, V.; KLAPETEK, P.; KAUR, N. Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy. Journal of Optics, 2021, vol. 23, no. 10, p. 105602-105602. ISSN: 2040-8986.Detail
VOHÁNKA, J.; OHLÍDAL, I.; BURŠÍKOVÁ, V.; KLAPETEK, P.; KAUR, N. Optical characterization of inhomogeneous thin films with randomly rough boundaries. OPTICS EXPRESS, 2022, vol. 30, no. 2, p. 2033-2047. ISSN: 1094-4087.Detail
VOHÁNKA, J.; ŠULC, V.; OHLÍDAL, I.; OHLÍDAL, M.; KLAPETEK, P. Optical method for determining the power spectral density function of randomly rough surfaces by simultaneous processing of spectroscopic reflectometry, variable-angle spectroscopic ellipsometry and angle-resolved scattering data. Optik, 2023, vol. 280, no. 170775, ISSN: 1618-1336.Detail
OHLÍDAL, I.; VOHANKA, J.; BURŠÍKOVÁ, V.; DVOŘÁK, J.; KLAPETEK, P.; KAUR, N. Optical characterization of inhomogeneous thin films with randomly rough boundaries exhibiting wide intervals of spatial frequencies. OPTICS EXPRESS, 2022, vol. 30, no. 21, p. 39068-39085. ISSN: 1094-4087.Detail
PEKAŘ, V.; BŘEZINA, J.; ŠKODA, D.; OHLÍDAL, I.; VOHÁNKA, J.; FRANTA, D.; FRANTA, P.; DVOŘÁK, J.; OHLÍDAL, M.; ŠULC, V.; KLAPETEK, P.; HAVLÍČEK, M.: MEO_DP0026_2021_GFUNK02; Vysoceodrazná vrstva na substrátu ve specifikaci R >= 98,5 % @ 248 nm a R >= 98 % @ 213 nm pro úhel dopadu 45. Meopta – optika, s.r.o. Kabelíkova 2682/1 750 02 Přerov. (funkční vzorek)Detail
PEKAŘ, V.; BŘEZINA, J.; ŠKODA, D.; OHLÍDAL, I.; VOHÁNKA, J.; FRANTA, D.; FRANTA, P.; DVOŘÁK, J.; OHLÍDAL, M.; ŠULC, V.; KLAPETEK, P.; HAVLÍČEK, M.: MEO_DP0026_2022_GFUNK03; Soubor dělicích vrstev ve specifikaci s parametry prvního děliče Rp = 50 % ± 3 % @248 nm; druhého děliče Rp = <0,4; 0,75> a Rs < 1 % na vlnové délce 248 nm a zvýšenou propustností v oblasti od 630 nm do 670 nm. Meopta – optika, s.r.o. Kabelíkova 2682/1 750 02 Přerov. (funkční vzorek)Detail
PEKAŘ, V.; BŘEZINA, J.; ŠKODA, D.; OHLÍDAL, I.; VOHÁNKA, J.; FRANTA, D.; FRANTA, P.; OHLÍDAL, M.; ŠULC, V.; KLAPETEK, P.; HAVLÍČEK, M.: MEO_DP0026_2020_GFUNK01; Antireflexní vrstva na substrátu ve specifikaci T>=99,8 %@ 248 nm a T>=98,5 % @ 213 nm. Meopta – optika, s.r.o. Kabelíkova 2682/1 750 02 Přerov. (funkční vzorek)Detail