This project was co-financed with state support of the CR Technological Agency as part of Národní centra kompetence 1
www.tacr.cz
Research useful for society.

Project detail

Advanced imaging of nanoscale materials in SEM

Duration: 01.02.2019 — 31.12.2022

Funding resources

Technologická agentura ČR - Národní centra kompetence 1

- whole funder

On the project

SEMs are the most versatile and widespread electron microscopes worldwide. However, with decreasing dimensions of devices TEMs are getting more involved in the fabrication and inspection. Additionally, for specific tasks (magnetic imaging in storage industry) dedicated instruments other than electron microscopes are necessary. We aim to develop new procedures for imaging in SEMs, including new beam generation techniques, for adding functionalities to SEMs.

Keywords
SEM;TEM;detector;nanostructures

Mark

TN01000008/10

Default language

English

People responsible

Kolíbal Miroslav, prof. doc. Ing., Ph.D. - fellow researcher
Urbánek Michal, Ing., Ph.D. - principal person responsible

Units

Fabrication and Characteris. of Nanostr.
- beneficiary (2019-01-29 - not assigned)

Responsibility: Urbánek Michal, Ing., Ph.D.