SEMs are the most versatile and widespread electron microscopes worldwide. However, with decreasing dimensions of devices TEMs are getting more involved in the fabrication and inspection. Additionally, for specific tasks (magnetic imaging in storage industry) dedicated instruments other than electron microscopes are necessary. We aim to develop new procedures for imaging in SEMs, including new beam generation techniques, for adding functionalities to SEMs.

Keywords
SEM;TEM;detector;nanostructures

TN01000008/10

English

Urbánek Michal, Ing., Ph.D. - principal person responsible
Kolíbal Miroslav, prof. Ing., Ph.D. - fellow researcher

Fabrication and Characteris. of Nanostr.
- responsible department (29.1.2019 - not assigned)
Fabrication and Characteris. of Nanostr.
- beneficiary (29.1.2019 - not assigned)

Responsibility: Urbánek Michal, Ing., Ph.D.