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Project detail
Duration: 01.02.2019 — 31.12.2022
Funding resources
Technologická agentura ČR - Národní centra kompetence 1
- whole funder
On the project
SEMs are the most versatile and widespread electron microscopes worldwide. However, with decreasing dimensions of devices TEMs are getting more involved in the fabrication and inspection. Additionally, for specific tasks (magnetic imaging in storage industry) dedicated instruments other than electron microscopes are necessary. We aim to develop new procedures for imaging in SEMs, including new beam generation techniques, for adding functionalities to SEMs.
KeywordsSEM;TEM;detector;nanostructures
Mark
TN01000008/10
Default language
English
People responsible
Kolíbal Miroslav, doc. Ing., Ph.D. - fellow researcherUrbánek Michal, Ing., Ph.D. - principal person responsible
Units
Fabrication and Characteris. of Nanostr.- beneficiary (2019-01-29 - not assigned)