Project detail

Investigation of electrical, optical and mechanical properties of thin films of novel materials deposited via ALD.

Duration: 01.03.2022 — 28.02.2023

Funding resources

Brno University of Technology - Vnitřní projekty VUT

- whole funder (2022-01-01 - 2023-12-31)

On the project

The recent advancements in ALD technology along with the development in organic chemistry of suitable novel ALD precursors enabled the synthesis of ultrathin homogenous films like 2D TMDCs or MeNx. The complex information about their structure to property relationship is still missing, in particular regarding the electronic, optical and mechanical properties.The goal of this project is to investigate and compare these properties of TMDCs MoX (X=S, Se, Te), and MeNx (M=Ti, Ta, Al) thin-films deposited via ALD on Si, quartz glass and Ti foil.

Mark

CEITEC VUT-J-22-8033

Default language

Czech

People responsible

Macák Jan, Dr. Ing. - fellow researcher
Baishya Kaushik, M.Sc. - principal person responsible

Units

Advanced Low-Dimensional Nanomaterials
- internal (2022-01-01 - 2022-12-31)
Central European Institute of Technology BUT
- beneficiary (2022-01-01 - 2022-12-31)

Responsibility: Baishya Kaushik, M.Sc.