Cílem projektu je navržení a sestavení zařízení FIB-SEM s vysunovatelným pixeloveným detektorem vhodným k analýze 4D-STEM a odladění kompletního pracovního postupu od vyřezání lamely po její 4D-STEM analýzu bez nutnosti expozice lamely atmosféře.

Description in English
The project aims to design and build a FIB-SEM device with a retractable pixellated detector suitable for 4D STEM analysis along with a complete workflow from millin a lamella to 4D STEM analysis without exposing the sample to the atmosphere. The project further aims to integrate the said detector by synchronizing it with microscope scanning and adding the cumulative signal as a new detector for live scanning. It will be possible to set up the detector and start 4D STEM mapping from within the microscope software. Secondary goals of the project will be "Prototype detector for 4D STEM" and "Software for pixel data conversion and image interpretation," for use/applications outside the FIB-SEM 4D STEM domain.

Keywords
4D STEM; FIB-SEM system; electron diffraction; pixellated detector; Timepix3;

Key words in English
4D STEM, FIB-SEM system, electron diffraction, pixellated detector, Timepix3

FW06010396

Czech

Šikola Tomáš, prof. RNDr., CSc. - principal person responsible

Fabrication and Characteris. of Nanostr.
- responsible department (14.6.2022 - not assigned)
Fabrication and Characteris. of Nanostr.
- beneficiary (14.6.2022 - not assigned)

Responsibility: Šikola Tomáš, prof. RNDr., CSc.