Magnetic contrast imaging of sub-100-nm devices with high spatial resolution is required for validation and failure analysis of magnetic recording technology (e.g. MRAM). Current approaches using transmission electron microscopy and ultra-high vacuum scanning electron microscopy are demanding in terms of complicated sample preparation, low sample throughput, and low-accessibility of these high-end instruments.

Keywords
electron microscope; vacuum

TN02000020/009

English

Uhlíř Vojtěch, Ing., Ph.D. - principal person responsible

Nanomagnetism and spintronics
- responsible department (16.3.2023 - not assigned)
Nanomagnetism and spintronics
- beneficiary (16.3.2023 - not assigned)

Responsibility: Uhlíř Vojtěch, Ing., Ph.D.