Publication detail

Gas sensor based on MEMS cantilever resonator

GABLECH, I.

Original Title

Gas sensor based on MEMS cantilever resonator

Type

conference proceedings

Language

English

Original Abstract

The aim of this work is about fabrication of MEMS gas sensor based on resonance cantilever beam. Cantilever will exploit piezoelectric effect; frequency of oscillation is measured with change of load of cantilever. Loading of cantilever is dependent on molecules bind on active layer which could be realized by using polymers, carbon nanotubes, etc. Sensor will be created as sandwich structure with silicon oxide passivation layer. Bottom electrode will be made from titanium. It is very important to reach required crystallographic structure of piezoelectric aluminum nitride layer with c-axis orientation which is in the middle of electrodes. This crystallographic structure is affected by crystallographic structure of titanium layer. Top electrode will be fabricated from gold. Width of cantilever beam will be in range from 50 µm to 200 µm and length will be in range from 100 µm to 800 µm with thickness about 2.5 µm. These dimensions will be optimized to find ideal resonance of cantilever. MEMS gas sensors can achieve very sensitive detection limit (several ppm) and very fast response (hundreds of milliseconds).

Keywords

MEMS, piezoelectric effect, aluminum nitride, gas sensor

Authors

GABLECH, I.

Released

23. 4. 2015

Publisher

Masarykova univerzita

Location

Brno

ISBN

978-80-210-7825-3

Book

CEITEC PhD Retreat

Edition

1

Edition number

1

Pages count

1

BibTex

@proceedings{BUT114368,
  editor="Imrich {Gablech}",
  title="Gas sensor based on MEMS cantilever resonator
",
  year="2015",
  series="1",
  number="1",
  pages="1",
  publisher="Masarykova univerzita",
  address="Brno",
  isbn="978-80-210-7825-3"
}