Detail publikace

Gas sensor based on MEMS cantilever resonator

GABLECH, I.

Originální název

Gas sensor based on MEMS cantilever resonator

Typ

konferenční sborník (ne článek)

Jazyk

angličtina

Originální abstrakt

The aim of this work is about fabrication of MEMS gas sensor based on resonance cantilever beam. Cantilever will exploit piezoelectric effect; frequency of oscillation is measured with change of load of cantilever. Loading of cantilever is dependent on molecules bind on active layer which could be realized by using polymers, carbon nanotubes, etc. Sensor will be created as sandwich structure with silicon oxide passivation layer. Bottom electrode will be made from titanium. It is very important to reach required crystallographic structure of piezoelectric aluminum nitride layer with c-axis orientation which is in the middle of electrodes. This crystallographic structure is affected by crystallographic structure of titanium layer. Top electrode will be fabricated from gold. Width of cantilever beam will be in range from 50 µm to 200 µm and length will be in range from 100 µm to 800 µm with thickness about 2.5 µm. These dimensions will be optimized to find ideal resonance of cantilever. MEMS gas sensors can achieve very sensitive detection limit (several ppm) and very fast response (hundreds of milliseconds).

Klíčová slova

MEMS, piezoelectric effect, aluminum nitride, gas sensor

Autoři

GABLECH, I.

Vydáno

23. 4. 2015

Nakladatel

Masarykova univerzita

Místo

Brno

ISBN

978-80-210-7825-3

Kniha

CEITEC PhD Retreat

Edice

1

Číslo edice

1

Strany počet

1

BibTex

@proceedings{BUT114368,
  editor="Imrich {Gablech}",
  title="Gas sensor based on MEMS cantilever resonator
",
  year="2015",
  series="1",
  number="1",
  pages="1",
  publisher="Masarykova univerzita",
  address="Brno",
  isbn="978-80-210-7825-3"
}