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SOMER, J. ŠTEKOVIČ, M. URBAN, F. SZENDIUCH, I.
Original Title
Development of Optical Inclinometer in LTCC Technology
Type
conference paper
Language
English
Original Abstract
This paper is focused on the development of the free standing structures in Low Temperature Co-fired Ceramics (LTCC) using thick film pastes and sacrificial carbon tape. There are many ways how to create a free standing thick film structure. One of the most common one is using sacrificial volume material with screen printed thick film. Using this method we have created mechanical structures consisting only off the thick film paste bridge suspended between two LTCC parts. These free standing bridges can act as a mechanical support of a seismic mass. Testing of the suitability of the materials for the manufacturing process was performed. There were three different LTCC substrates and different conductive, resistive and dielectric thick film pastes studied. Mechanical testing of the manufactured free standing bridges was also performed. The design of the optical inclinometer in LTCC technology based on the free standing bridges was made and first samples manufactured.
Keywords
thick film technology, LTCC, sensors, inclinometer, optical fibres
Authors
SOMER, J.; ŠTEKOVIČ, M.; URBAN, F.; SZENDIUCH, I.
RIV year
2015
Released
6. 5. 2015
Publisher
Budapest University of Technology and Economics
Location
Hungary
ISBN
978-963-313-177-0
Book
Novel Trends in Electronics Manufacturing - Book of Abtracts 38th International Spring Seminar on Electronics Technology
Pages from
482
Pages to
486
Pages count
5
URL
https://ieeexplore.ieee.org/document/7248045
BibTex
@inproceedings{BUT115672, author="Jakub {Somer} and Michal {Štekovič} and František {Urban} and Ivan {Szendiuch}", title="Development of Optical Inclinometer in LTCC Technology", booktitle="Novel Trends in Electronics Manufacturing - Book of Abtracts 38th International Spring Seminar on Electronics Technology", year="2015", pages="482--486", publisher="Budapest University of Technology and Economics", address="Hungary", doi="10.1109/ISSE.2015.7248045", isbn="978-963-313-177-0", url="https://ieeexplore.ieee.org/document/7248045" }