Detail publikace

Development of Optical Inclinometer in LTCC Technology

SOMER, J. ŠTEKOVIČ, M. URBAN, F. SZENDIUCH, I.

Originální název

Development of Optical Inclinometer in LTCC Technology

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

This paper is focused on the development of the free standing structures in Low Temperature Co-fired Ceramics (LTCC) using thick film pastes and sacrificial carbon tape. There are many ways how to create a free standing thick film structure. One of the most common one is using sacrificial volume material with screen printed thick film. Using this method we have created mechanical structures consisting only off the thick film paste bridge suspended between two LTCC parts. These free standing bridges can act as a mechanical support of a seismic mass. Testing of the suitability of the materials for the manufacturing process was performed. There were three different LTCC substrates and different conductive, resistive and dielectric thick film pastes studied. Mechanical testing of the manufactured free standing bridges was also performed. The design of the optical inclinometer in LTCC technology based on the free standing bridges was made and first samples manufactured.

Klíčová slova

thick film technology, LTCC, sensors, inclinometer, optical fibres

Autoři

SOMER, J.; ŠTEKOVIČ, M.; URBAN, F.; SZENDIUCH, I.

Rok RIV

2015

Vydáno

6. 5. 2015

Nakladatel

Budapest University of Technology and Economics

Místo

Hungary

ISBN

978-963-313-177-0

Kniha

Novel Trends in Electronics Manufacturing - Book of Abtracts 38th International Spring Seminar on Electronics Technology

Strany od

482

Strany do

486

Strany počet

5

URL

https://ieeexplore.ieee.org/document/7248045

BibTex

@inproceedings{BUT115672,
  author="Jakub {Somer} and Michal {Štekovič} and František {Urban} and Ivan {Szendiuch}",
  title="Development of Optical Inclinometer in LTCC Technology",
  booktitle="Novel Trends in Electronics Manufacturing - Book of Abtracts 38th International Spring Seminar on Electronics Technology",
  year="2015",
  pages="482--486",
  publisher="Budapest University of Technology and Economics",
  address="Hungary",
  doi="10.1109/ISSE.2015.7248045",
  isbn="978-963-313-177-0",
  url="https://ieeexplore.ieee.org/document/7248045"
}