Publication detail

Electron Cyclotron Resonance Plasma and Ion Sources Design and Use

BOUŠEK, J.

Original Title

Electron Cyclotron Resonance Plasma and Ion Sources Design and Use

Type

conference paper

Language

English

Original Abstract

Various configurations of Electron Cyclotrone Resonance (ECR) plasma reactors were reported recently for emerging new applications as nanotubes, nanorods, nanobells and field emission devices. Basic principles of ECR plasma generation and the most important features are here discussed. A simple ECR plasma and ion source design is described and examples of some parameter dependences are given.

Key words in English

Electron Cyclotrone Resonance, plasma reactor, plasma density, electron energy, chemical vapor deposition

Authors

BOUŠEK, J.

RIV year

2004

Released

9. 9. 2004

Publisher

Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105

Location

Brno

ISBN

80-214-2701-9

Book

Electronic Devices and Systems 2004. Proceedings.

Pages from

251

Pages to

254

Pages count

4

BibTex

@inproceedings{BUT12994,
  author="Jaroslav {Boušek}",
  title="Electron Cyclotron Resonance Plasma and Ion Sources Design and Use",
  booktitle="Electronic Devices and Systems 2004. Proceedings.",
  year="2004",
  pages="4",
  publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  address="Brno",
  isbn="80-214-2701-9"
}