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Publication detail
BOUŠEK, J.
Original Title
Electron Cyclotron Resonance Plasma and Ion Sources Design and Use
Type
conference paper
Language
English
Original Abstract
Various configurations of Electron Cyclotrone Resonance (ECR) plasma reactors were reported recently for emerging new applications as nanotubes, nanorods, nanobells and field emission devices. Basic principles of ECR plasma generation and the most important features are here discussed. A simple ECR plasma and ion source design is described and examples of some parameter dependences are given.
Key words in English
Electron Cyclotrone Resonance, plasma reactor, plasma density, electron energy, chemical vapor deposition
Authors
RIV year
2004
Released
9. 9. 2004
Publisher
Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105
Location
Brno
ISBN
80-214-2701-9
Book
Electronic Devices and Systems 2004. Proceedings.
Pages from
251
Pages to
254
Pages count
4
BibTex
@inproceedings{BUT12994, author="Jaroslav {Boušek}", title="Electron Cyclotron Resonance Plasma and Ion Sources Design and Use", booktitle="Electronic Devices and Systems 2004. Proceedings.", year="2004", pages="4", publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105", address="Brno", isbn="80-214-2701-9" }