Detail publikace

Electron Cyclotron Resonance Plasma and Ion Sources Design and Use

BOUŠEK, J.

Originální název

Electron Cyclotron Resonance Plasma and Ion Sources Design and Use

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

Various configurations of Electron Cyclotrone Resonance (ECR) plasma reactors were reported recently for emerging new applications as nanotubes, nanorods, nanobells and field emission devices. Basic principles of ECR plasma generation and the most important features are here discussed. A simple ECR plasma and ion source design is described and examples of some parameter dependences are given.

Klíčová slova v angličtině

Electron Cyclotrone Resonance, plasma reactor, plasma density, electron energy, chemical vapor deposition

Autoři

BOUŠEK, J.

Rok RIV

2004

Vydáno

9. 9. 2004

Nakladatel

Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105

Místo

Brno

ISBN

80-214-2701-9

Kniha

Electronic Devices and Systems 2004. Proceedings.

Strany od

251

Strany do

254

Strany počet

4

BibTex

@inproceedings{BUT12994,
  author="Jaroslav {Boušek}",
  title="Electron Cyclotron Resonance Plasma and Ion Sources Design and Use",
  booktitle="Electronic Devices and Systems 2004. Proceedings.",
  year="2004",
  pages="4",
  publisher="Ing. Zdeněk Novotný, CSc., Brno, Ondráčkova 105",
  address="Brno",
  isbn="80-214-2701-9"
}