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VODÁK, J. NEČAS, D. OHLÍDAL, M. OHLÍDAL, I.
Original Title
Determination of local thickness values of non-uniform thin films by imaging spectroscopic reflectometer with enhanced spatial resolution
Type
journal article in Web of Science
Language
English
Original Abstract
In this paper an imaging spectroscopic reflectometer with enhanced spatial resolution is presented. Main features of its design, experimental data acquisition, i.e. maps of thin film spectral dependencies of local reflectance and the local thickness map determination are described. The ability of this instrument to characterize thin film thickness non-uniformity with high gradients is demonstrated on measurements of thin film edges. A comparison with an older device is also presented.
Keywords
enhanced spatial resolution, high gradient thickness distribution, imaging spectroscopic reflectometer, non-uniform thin films
Authors
VODÁK, J.; NEČAS, D.; OHLÍDAL, M.; OHLÍDAL, I.
Released
12. 1. 2017
Publisher
IOP Publishing
ISBN
0957-0233
Periodical
Measurement Science and Technology
Year of study
28
Number
2
State
United Kingdom of Great Britain and Northern Ireland
Pages from
025205
Pages to
025205-6
Pages count
6
URL
http://iopscience.iop.org/article/10.1088/1361-6501/aa5534