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OHLÍDAL, I. OHLÍDAL, M. KLAPETEK, P. ČUDEK, V. JÁKL, M.
Original Title
Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
Type
conference paper
Language
English
Original Abstract
For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.
Keywords
Films nonuniform in optical parameters, optical characterization
Authors
OHLÍDAL, I.; OHLÍDAL, M.; KLAPETEK, P.; ČUDEK, V.; JÁKL, M.
RIV year
2003
Released
1. 9. 2003
Publisher
SPIE-The International Society for Optical Engineering
Location
Bellingham, Washington, USA
ISBN
0-8194-5055-3
Book
Proceedings of SPIE
Edition
Wave-Optical Systems Engineering II
Edition number
Vol 5182
0277-786X
Periodical
Year of study
State
United States of America
Pages from
260
Pages to
271
Pages count
12
BibTex
@inproceedings{BUT14081, author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Petr {Klapetek} and Vladimír {Čudek} and Miloš {Jákl}", title="Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry", booktitle="Proceedings of SPIE", year="2003", series="Wave-Optical Systems Engineering II", journal="Proceedings of SPIE", volume="Vol 5182", number="Vol 5182", pages="260--271", publisher="SPIE-The International Society for Optical Engineering", address="Bellingham, Washington, USA", isbn="0-8194-5055-3", issn="0277-786X" }