Publication detail

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

OHLÍDAL, I. OHLÍDAL, M. KLAPETEK, P. ČUDEK, V. JÁKL, M.

Original Title

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

Type

conference paper

Language

English

Original Abstract

For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.

Keywords

Films nonuniform in optical parameters, optical characterization

Authors

OHLÍDAL, I.; OHLÍDAL, M.; KLAPETEK, P.; ČUDEK, V.; JÁKL, M.

RIV year

2003

Released

1. 9. 2003

Publisher

SPIE-The International Society for Optical Engineering

Location

Bellingham, Washington, USA

ISBN

0-8194-5055-3

Book

Proceedings of SPIE

Edition

Wave-Optical Systems Engineering II

Edition number

Vol 5182

ISBN

0277-786X

Periodical

Proceedings of SPIE

Year of study

Vol 5182

State

United States of America

Pages from

260

Pages to

271

Pages count

12

BibTex

@inproceedings{BUT14081,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Petr {Klapetek} and Vladimír {Čudek} and Miloš {Jákl}",
  title="Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry",
  booktitle="Proceedings of SPIE",
  year="2003",
  series="Wave-Optical Systems Engineering II",
  journal="Proceedings of SPIE",
  volume="Vol 5182",
  number="Vol 5182",
  pages="260--271",
  publisher="SPIE-The International Society for Optical Engineering",
  address="Bellingham, Washington, USA",
  isbn="0-8194-5055-3",
  issn="0277-786X"
}