Detail publikace

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

OHLÍDAL, I. OHLÍDAL, M. KLAPETEK, P. ČUDEK, V. JÁKL, M.

Originální název

Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

Typ

článek ve sborníku ve WoS nebo Scopus

Jazyk

angličtina

Originální abstrakt

For applying this method the special experimental arrangement containing CCD camera as a detector is used. The spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large area of the substrates of the nonuniform films are found.

Klíčová slova

Films nonuniform in optical parameters, optical characterization

Autoři

OHLÍDAL, I.; OHLÍDAL, M.; KLAPETEK, P.; ČUDEK, V.; JÁKL, M.

Rok RIV

2003

Vydáno

1. 9. 2003

Nakladatel

SPIE-The International Society for Optical Engineering

Místo

Bellingham, Washington, USA

ISBN

0-8194-5055-3

Kniha

Proceedings of SPIE

Edice

Wave-Optical Systems Engineering II

Číslo edice

Vol 5182

ISSN

0277-786X

Periodikum

Proceedings of SPIE

Ročník

Vol 5182

Stát

Spojené státy americké

Strany od

260

Strany do

271

Strany počet

12

BibTex

@inproceedings{BUT14081,
  author="Ivan {Ohlídal} and Miloslav {Ohlídal} and Petr {Klapetek} and Vladimír {Čudek} and Miloš {Jákl}",
  title="Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry",
  booktitle="Proceedings of SPIE",
  year="2003",
  series="Wave-Optical Systems Engineering II",
  journal="Proceedings of SPIE",
  volume="Vol 5182",
  number="Vol 5182",
  pages="260--271",
  publisher="SPIE-The International Society for Optical Engineering",
  address="Bellingham, Washington, USA",
  isbn="0-8194-5055-3",
  issn="0277-786X"
}