Publication detail

Analysis of the Impact of the Baffle Placement in the Supersonic Flow in the Differentially Pumped Chamber

BÍLEK, M.

Original Title

Analysis of the Impact of the Baffle Placement in the Supersonic Flow in the Differentially Pumped Chamber

Type

conference paper

Language

English

Original Abstract

The thesis follows to the work of G.D. Danilatos occupy Differential Pumping System with fast stopper focusing on dew design for environmental scanning electron microscope. Thesis concern divider located in the chamber differntial pumping and its influence on the nature of the flow. Simulation of individual vairants was evaluated using the program Ansys Fluent, which caluvulates with the method final volumes as opposed to calculations performed by G.D. Danilatos which uses the statistical method Monte Carlo.

Keywords

Environmental scanning electron microscope (ESEM), ANSYS Fluen, Differentially pumped chambe

Authors

BÍLEK, M.

Released

20. 10. 2018

ISBN

978-80-214-5109-4

Book

ECS Transactions

ISBN

1938-5862

Periodical

ECS Transactions

Number

1

State

United States of America

Pages from

45

Pages to

50

Pages count

5

BibTex

@inproceedings{BUT150632,
  author="Michal {Bílek}",
  title="Analysis of the Impact of the Baffle Placement in the Supersonic Flow in the Differentially Pumped Chamber",
  booktitle="ECS Transactions",
  year="2018",
  journal="ECS Transactions",
  number="1",
  pages="45--50",
  doi="10.1149/08701.0405ecst",
  isbn="978-80-214-5109-4",
  issn="1938-5862"
}